Value proposition

SPTS Technologies, a KLA company, designs, manufactures, sells, and supports advanced etch, and deposition equipment and process technologies for the global semiconductor and microdevice industries, with focus on the MEMS, advanced packaging, high speed RF device, power management and photonics sectors. The solutions offered by SPTS include industry leading silicon etch, dielectric etch, dry-release etch, PVD, MVD® and PECVD, all available with a range of wafer-handling options applicable to R&D, pilot production, or volume production environments.

SPTS supplies its leading processing equipment to the world's leading semiconductor device manufacturers and research institutions, and offers comprehensive service and spare parts support through a worldwide network of service centers and qualified local agents

SPTS operates manufacturing facilities in Newport, Wales and Allentown (PA) , and operates across 19 countries in Europe, North America and Asia-Pacific. For more information visit www.spts.com.

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wafer processing solutions, PVD, PECVD, DRIE, silicon etch, dielectric etch, dry-release etch, FOWLP, through-silicon vias (TSVs), MEMS, Advanced Packaging, wafer level packaging (WLP), HF release etch, XeF2 vapor release etch, Plasma Dicing, MVD, FOWLP, Compound Semiconductors, PiezoMEMS, Silicon Carbide (SiC), VCSELs, and Via Reveal